Semiconductor device and method of manufacturing semiconductor device

ABSTRACT

A semiconductor device according to the present invention includes a first conductive-type semiconductor layer, a second conductive-type base region that is arranged in the front surface portion of the semiconductor layer, a plurality of trenches that extend from a front surface of the semiconductor layer beyond a bottom portion of the base region with an active region being defined therebetween, a plurality of first conductive-type emitter regions that are arranged in the active region, each connecting the trenches adjacent to each other, a gate electrode that is embedded in the trench, an embedding insulating film that is embedded in the trench on the gate electrode and that has an upper surface in the same height position as the front surface of the semiconductor layer or in a height position lower than the front surface and an emitter electrode that covers the active region and the embedding insulating film and that is electrically connected to the base region and the emitter region.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application corresponds to Japanese Patent Application No.2014-83755 filed in the Japan Patent Office on Apr. 15, 2014, JapanesePatent Application No. 2014-83756 filed in the Japan Patent Office onApr. 15, 2014 and Japanese Patent Application No. 2015-81869 filed inthe Japan Patent Office on Apr. 13, 2015, and all the disclosures of theapplications will be incorporated herein by citation.

FIELD OF THE INVENTION

The present invention relates to a semiconductor device including atrench gate IGBT and a method of manufacturing the same.

BACKGROUND ART

As a patent document disclosing a general trench gate IGBT, for example,Patent Document 1 (Japanese Patent No. 4785334) is known.

BRIEF SUMMARY OF THE INVENTION

In the structure of the IGBT in Patent Document 1, a gate electrode andan emitter electrode within a trench are insulated with an interlayerinsulating film on the Si surface. In the interlayer insulating film, acontact hole that exposes the Si surface between adjacent trenches isformed. The emitter electrode is connected to the Si surface via thecontact hole.

In such a structure, in order to prevent a short circuit from beingproduced between the gate electrode and the emitter electrode, it isnecessary to design the position and the size of the contact holeincluding a margin (for example, 0.35 to 0.5 μm) with considerationgiven to the displacement of a mask, variations in dimension and thelike. This constraint limits the spacing between the adjacent trenchesand makes it difficult to reduce the size of a device.

An object of the present invention is to provide a semiconductor devicethat can reduce the size of a device without need of a design marginwhen a contact is formed in an emitter region and a method ofmanufacturing the same.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic plan view of a semiconductor device according to apreferred embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of the semiconductor deviceaccording to the preferred embodiment of the present invention andcorresponds to a cross section of the semiconductor device taken alongline A-A in FIG. 1.

FIG. 3 is a schematic cross-sectional view of the semiconductor deviceaccording to the preferred embodiment of the present invention andcorresponds to a cross section of the semiconductor device taken alongline B-B in FIG. 1.

FIG. 4 is a circuit diagram of an inverter incorporating thesemiconductor device.

FIGS. 5A to 5L are diagrams showing part of the manufacturing process ofthe semiconductor device.

FIG. 6 is simulation data indicating a relationship between a depth froma Si surface and a hole density.

FIG. 7 is simulation data indicating a relationship between acollector-emitter voltage (VCE) and a collector current (IC).

FIG. 8 is a schematic cross-sectional view of a semiconductor deviceaccording to a preferred embodiment of the present invention.

FIG. 9 is a schematic cross-sectional view of the semiconductor deviceaccording to the preferred embodiment of the present invention andcorresponds to a cross section of the semiconductor device taken alongline A-A in FIG. 1.

FIG. 10 is a schematic cross-sectional view of the semiconductor deviceaccording to the preferred embodiment of the present invention andcorresponds to a cross section of the semiconductor device taken alongline B-B in FIG. 1.

FIG. 11 is a schematic cross-sectional view of the semiconductor deviceaccording to the preferred embodiment of the present invention andcorresponds to a cross section of the semiconductor device taken alongline C-C in FIG. 1.

FIGS. 12A to 12F are diagrams showing part of the manufacturing processof the semiconductor device in FIGS. 9 to 11.

DETAILED DESCRIPTION OF THE INVENTION

According to a preferred embodiment of the present invention, there isprovided a semiconductor device including a first conductive-typesemiconductor layer, a second conductive-type base region that isarranged in a front surface portion of the semiconductor layer, aplurality of trenches that extend from a front surface of thesemiconductor layer beyond a bottom portion of the base region, anactive region being defined therebetween, a plurality of firstconductive-type emitter regions that are arranged in the active region,each connecting the trenches adjacent to each other, a gate electrodethat is embedded in the trench, an embedding insulating film that isembedded in the trench on the gate electrode and that has an uppersurface in the same height position as the front surface of thesemiconductor layer or in a height position lower than the front surfaceand an emitter electrode that covers the active region and the embeddinginsulating film and that is electrically connected to the base regionand the emitter region.

In this configuration, since it is possible to insulate the gateelectrode and the emitter electrode with the embedding insulating film,the entire semiconductor surface of the active region between adjacenttrenches can be used as an emitter contact region. Hence, when thecontact is formed in the emitter region, it is not necessary to providea design margin with consideration given to the displacement of a mask,variations in dimension and the like. Furthermore, since the structureof the emitter region is a bridged structure that connects adjacenttrenches, it is not necessary to provide the same design margin.Consequently, it is possible to achieve a reduction in the size of thedevice without any design margin.

Then, the width of the active region is decreased by the reduction inthe size, and thus a hole density in the semiconductor layer isincreased, with the result that it is possible to reduce an on-voltage.Hence, while a relatively low on-voltage is maintained, the area ratio(the arrangement rate of the emitter regions) of the emitter regions tothe base regions is adjusted, and thus it is possible to easily controlthe short circuit resistance value. Consequently, it is possible toimprove the trade-off relationship between the on-voltage and the shortcircuit resistance amount.

In the preferred embodiment of the present invention, the emitterelectrode may be a flat electrode.

In this configuration, it is possible to enhance the joint strength whena wiring member such as a bonding wire is joined to the emitterelectrode.

In the preferred embodiment of the present invention, a secondconductive-type base contact region may be included that is selectivelyarranged in the active region and that is connected to the base regionat a bottom portion.

The base contact region may be formed shallower than the emitter region.

The base contact region may be formed shallower than the embeddinginsulating film, and the emitter region may be formed deeper than theembedding insulating film.

The base contact region may be formed in the entire region of the activeregion other than the emitter region.

The trenches may be formed in a stripe shape, and the emitter regionsmay be formed in a stripe shape perpendicularly intersecting thetrenches in the stripe shape.

The spacing between the trenches adjacent to each other may be 1 μm orless. The spacing between the emitter regions adjacent to each other maybe 3.5 μm to 10 μm.

The embedding insulating film may be formed of SiO₂, the gate electrodemay be formed of polysilicon, the semiconductor layer may be formed ofSi and the emitter electrode may be formed of an Al—Si—Cu alloy.

In the preferred embodiment of the present invention, a barrier layermay further be included that has a Ti/TiN/Ti multilayer structurearranged between the emitter electrode and the semiconductor layer.

According to the preferred embodiment of the present invention, there isprovided a method of manufacturing a semiconductor device, the methodincluding a step of forming a second conductive-type base region in afront surface portion of a first conductive-type semiconductor layer, astep of forming a plurality of trenches that extend from a front surfaceof the semiconductor layer beyond a bottom portion of the base region soas to define an active region therebetween, a step of embedding thetrench with a gate electrode, a step of forming, by selectively removingthe gate electrode from an upper portion, a space defined by a sidesurface of the trench on the gate electrode, a step of embedding, in thespace, an embedding insulating film that has an upper surface in thesame height position as the front surface of the semiconductor layer orin a height position lower than the front surface, a step of forming, inthe active region, a plurality of first conductive-type emitter regionssuch that each of the emitter regions connects the trenches adjacent toeach other and a step of forming an emitter electrode so as to cover theactive region and the embedding insulating film.

By this method, it is possible to manufacture the semiconductor devicedescribed above.

The step of embedding the embedding insulating film may include a stepof depositing an insulating material so as to cover the front surface ofthe semiconductor layer and a step of forming the embedding insulatingfilm by etching back the insulatingmaterial until the front surface ofthe semiconductor layer is exposed.

The step of depositing the insulating material may include a step ofdepositing SiO₂ with a CVD method using a TEOS raw material.

According to the preferred embodiment of the present invention, there isprovided a semiconductor device including a first conductive-typesemiconductor layer, a second conductive-type base region that isarranged in a front surface portion of the semiconductor layer, aplurality of trenches that extend from a front surface of thesemiconductor layer beyond a bottom portion of the base region, a gateelectrode that is embedded in the trench, an insulating film thatprotrudes beyond the front surface of the semiconductor layer on thegate electrode and that has a side surface continuous to a side surfaceof the trench, a dug structure which is formed by a step between thesemiconductor layer and the insulating film and in which an activeregion formed with the semiconductor layer is defined in a bottomportion, a first conductive-type emitter region that is selectivelyarranged in the active region and an emitter electrode that covers theactive region and the insulating film and that is electrically connectedto the base region and the emitter region.

In this configuration, since it is possible to insulate the gateelectrode and the emitter electrode with the insulating film having aside surface continuous to the side surface of the trench, the entiresemiconductor surface of the active region between adjacent trenches canbe used as an emitter contact region. Hence, when the contact is formedin the emitter region, it is not necessary to provide a design marginwith consideration given to the displacement of a mask, variations indimension and the like. Consequently, it is possible to achieve areduction in the size of the device without any design margin.

Then, the width of the active region is decreased by the reduction inthe size, and thus a hole density in the semiconductor layer isincreased, with the result that it is possible to reduce an on-voltage.Hence, while a relatively low on-voltage is maintained, the area ratio(the arrangement rate of the emitter regions) of the emitter regions tothe base regions is adjusted, and thus it is possible to easily controlthe short circuit resistance value. Consequently, it is possible toimprove the trade-off relationship between the on-voltage and the shortcircuit resistance amount.

Furthermore, since the dug structure is formed, it is possible to reducethe distance from the semiconductor surface in the active region to theapex portion of the gate electrode. Hence, even if the emitter region isformed shallower as compared with a case where this structure is notformed, it is possible to reliably make the emitter region face the gateelectrode. Since the emitter region is allowed to be shallow, it ispossible to reduce the time in which the impurity is diffused when theemitter region is formed, and it is possible to reduce the spreading ofthe impurity laterally in a direction within a plane along the frontsurface of the semiconductor layer. In this way, it is possible toachieve the reduction in the size by reducing the loss of the pattern ofthe emitter region and to realize high performance by decreasing thedepth (base length) of the base region from the front surface of thesemiconductor .

The dug structure may be spread over an entire semiconductor regionbetween the trenches adjacent to each other.

The emitter region may be formed so as to connect the trenches adjacentto each other.

In this configuration, since the structure of the emitter region is abridged structure that connects adjacent trenches, it is not necessaryto provide the same design margin. Consequently, it is possible toachieve a reduction in the size of the device without any design margin.

In the preferred embodiment of the present invention, a secondconductive-type base contact region may be included that is selectivelyarranged in the active region and that is connected to the base regionat a bottom portion.

The base contact region may be formed at the same depth as the emitterregion.

The base contact region may be formed in an entire region of the activeregion other than the emitter region.

The trenches may be formed in a stripe shape, and the emitter regionsmay be formed in a stripe shape perpendicularly intersecting thetrenches in the stripe shape.

A spacing between the trenches adjacent to each other may be 1 μm orless.

A plurality of the emitter regions may be formed along the trenches, anda spacing between the emitter regions adjacent to each other may be 3.5μm to 10 μm.

The insulating film may be formed of SiO₂, the gate electrode may beformed of polysilicon, the semiconductor layer may be formed of Si andthe emitter electrode may be formed of an Al—Si—Cu alloy.

The semiconductor device according to the present invention may furtherinclude a barrier layer that has a Ti/TiN/Ti multilayer structurearranged between the emitter electrode and the semiconductor layer.

According to the preferred embodiment of the present invention, there isprovided a method of manufacturing a semiconductor device, the methodincluding a step of forming a second conductive-type base region in afront surface portion of a first conductive-type semiconductor layer, astep of forming a plurality of trenches that extend from a front surfaceof the semiconductor layer beyond a bottom portion of the base region, astep of embedding the trench with a gate electrode, a step of forming,by selectively removing the gate electrode from an upper portion, aspace defined by a side surface of the trench on the gate electrode, astep of embedding, in the space, an insulating film that has an uppersurface in the same height position as the front surface of thesemiconductor layer or in a height position lower than the frontsurface, a step of removing the semiconductor layer from the frontsurface in a self-aligned manner for the insulating film so as to form adug structure in which an active region formed with the semiconductorlayer is defined at a bottom portion, a step of selectively implanting afirst conductive-type impurity in the dug structure and diffusing thefirst conductive-type impurity so as to form an emitter region in theactive region and a step of forming an emitter electrode so as to coverthe active region and the insulating film.

By this method, it is possible to manufacture the semiconductor devicedescribed above.

The step of embedding the insulating film may include a step ofdepositing an insulating material so as to cover the front surface ofthe semiconductor layer and a step of forming the insulating film byetching back the insulating material until the front surface of thesemiconductor layer is exposed.

The step of depositing the insulating material may include a step ofdepositing SiO₂ with a CVD method using a TEOS raw material.

According to the preferred embodiment of the present invention, there isprovided a semiconductor device including a first conductive-typesemiconductor layer, a gate trench and an emitter trench that are formedin the semiconductor layer, a gate electrode that is embedded in thegate trench, an embedding electrode that is embedded in the emittertrench, a second conductive-type base region that is formed in a frontsurface portion of the semiconductor layer between the gate trench andthe emitter trench, a first conductive-type emitter region that isformed in a front surface portion of the base region, a first embeddinginsulating film that is embedded in the gate trench on the gateelectrode and that has an upper surface in the same height position as afront surface of the semiconductor layer or in a height position lowerthan the front surface, a second embedding insulating film that isembedded in the emitter trench on the embedded electrode and that has anupper surface in the same height position as the front surface of thesemiconductor layer or in a height position lower than the front surfaceand an emitter electrode that covers the first and second embeddinginsulating films and that are electrically connected to the base regionand the emitter region.

In the preferred embodiment of the present invention, a plurality of theemitter trenches may be formed, and the semiconductor device may includea second conductive-type floating region formed between the emittertrenches.

A preferred embodiment of the present invention will be described indetail below with reference to the accompanying drawings.

FIG. 1 is a schematic plan view of semiconductor devices 1 and 51according to the preferred embodiment of the present invention. FIGS. 2and 3 are schematic cross-sectional views of the semiconductor device 1,and respectively correspond to cross sections taken along lines A-A andB-B in FIG. 1. Although FIG. 1 is a plan view, some constituent elementsare hatched for clarity.

The semiconductor device 1 is a device that includes a trench gate IGBT,and includes a semiconductor substrate 2 as an example of thesemiconductor layer of the present invention. The semiconductorsubstrate 2 may be an n⁻-type silicon substrate having a thickness of,for example, 50 μm to 200 μm.

The semiconductor substrate 2 has a structure in which a p⁺-typecollector region 4, an n-type buffer region 5 and an n⁻-type driftregion 6 are sequentially deposited in layers from its back surface 3toward the front surface 7.

As a p-type dopant of the p⁺-type collector region 4, for example, B(boron), Al (aluminum) or the like can be used (the same applies for ap-type impurity region in the following description). On the other hand,as an n-type dopant of the n-type buffer region 5 and the n⁻-type driftregion 6, for example, N (nitrogen), P (phosphorus), As (arsenic) or thelike can be used (the same applies for an n-type impurity region in thefollowing description).

The dopant concentration of the p⁺-type collector region 4 is, forexample, 1×10¹⁵ cm⁻³ to 2×10¹⁹ cm⁻³. On the other hand, the dopantconcentration of the n-type buffer region 5 is, for example, 1×10¹⁵ cm⁻³to 5×10¹⁷ cm⁻³, and the dopant concentration of the n -type drift region6 is, for example, 1×10¹³ cm⁻³ to 5×10¹⁴ cm ⁻³.

In the front surface portion of the n⁻-type drift region 6, a p-typebase region 8 is formed, and furthermore, a plurality of gate trenches 9that extend from the front surface 7 beyond the bottom portion of thep-type base region 8 are formed. The dopant concentration of the p-typebase region 8 is, for example, 1×10¹⁶ cm⁻³ to 1×10¹⁸ cm⁻³. The depth ofthe p-type base region 8 from the front surface 7 is, for example, 1.0μm to 4.0 μm.

The gate trenches 9 are formed in a stripe shape parallel to each other.In this way, the p-type base region 8 between adjacent gate trenches 9is divided into the stripe shape. The divided stripe-shapedsemiconductor region (Si crystal region) is defined as an active region10.

As shown in FIG. 1, the spacing P₁ of the adjacent gate trenches 9 (thedistance between the centers of the gate trenches 9) is, for example, 1μm or less. The width W₁ of the gate trench 9 is, for example, 0.6 μm to3.0 μm and the width W₂ of the active region 10 is narrower than thewidth W₁ and is, for example, 0.5 μm to 1.5 μm.

In the gate trench 9, via a gate insulating film 11, a gate electrode 12is embedded. The gate insulating film 11 is formed of, for example,SiO₂, and the gate electrode 12 is formed of, for example, polysilicon.The thickness of the gate insulating film 11 is, for example, 1100 to1300 Å (in this preferred embodiment, 1200 Å).

The gate electrode 12 is embedded halfway along the direction of thedepth of the gate trench 9. In this way, in the gate trench 9, above thegate electrode 12, a space 13 defined by the upper surface of the gateelectrode 12 and both side surfaces of the gate trench 9 is formed.

The space 13 is shallower than the p-type base region 8 and forms, forexample, a shallow trench that extends over the entire region of thegate trench 9 in the longitudinal direction. The depth of the space 13from the front surface 7 is, for example, 0.2 μm to 0.5 μm.

In the space 13, an embedding insulating film 14 is embedded. Theembedding insulating film 14 is formed of, for example, SiO₂. Theembedding insulating film 14 has an upper surface 15 in the same heightposition as the front surface 7 of the active region 10 or in a heightposition lower than the front surface 7. When the upper surface 15 is inthe height position lower than the front surface 7 of the active region10, its difference in height is caused by a recess formed by slightlyover-etching an insulating material 38 when the insulating material 38,which will be described later, is etched back. Hence, the front surface7 of the semiconductor substrate 2 is a flat surface in which thesemiconductor (Si) surface and the insulator (SiO₂) surface arecontinuous without any step or is a substantially flat surface in whichthe insulation (SiO₂) surface is slightly recessed with respect to thesemiconductor (Si) surface to form an extremely shallow concave portion.

Between the embedding insulating film 14 and the gate electrode 12, aninsulting thin film 16 intervenes. The insulting thin film 16 is formed,for example, of SiO₂. The insulting thin film 16 is thinner than thegate insulating film 11, and has a thickness of, for example, 150 to 250Å (in this preferred embodiment, 200 Å).

In the active region 10, in the front surface portion of the p-type baseregion 8, a plurality of n⁺-type emitter regions 17 are formed. Each ofthe n⁺-type emitter regions 17 is formed so as to connect adjacent gatetrenches 9. That the n⁺-type emitter region 17 connects adjacent gatetrenches 9 means that as shown in FIG. 1, each of the n⁺-type emitterregions 17 is not divided while extending from one gate trench 9 to theother gate trench 9.

The n⁺-type emitter regions 17 are aligned in a stripe shape thatperpendicularly intersects the gate trenches 9 in the stripe shape. Inthis way, the gate trenches 9 and the n⁺-type emitter regions 17 as awhole are formed in a lattice shape in a plan view. As shown in FIG. 1,the spacing P₂ of the adjacent n⁺-type emitter regions 17 (the distancebetween the centers of the n⁺-type emitter regions 17) is, for example,3.5 μm to 10 μm. The width W₃ of the n⁺-type emitter region 17 is, forexample, 0.35 μm to 1.0 μm.

The n⁺-type emitter region 17 is formed deeper than the bottom portionof the embedding insulating film 14, and is opposite to the gateelectrode 12 via the gate insulating film 11. The depth of the n⁺-typeemitter region 17 from the front surface 7 is, for example, 0.6 μm to0.8 μm. The dopant concentration of the n⁺-type emitter region 17 is1×10¹⁹ cm⁻³ to 5×10²⁰ cm⁻³.

In the active region 10, in the front surface portion of the p-type baseregion 8, a plurality of p⁺-type base contact regions 18 are formed. Thep⁺-type base contact regions 18 are formed in the entire region exceptthe n⁺-type emitter regions 17 in the active region 10. In other words,in the active region 10, in the front surface portion of the p-type baseregion 8, the n⁺-type emitter regions 17 and the p⁺-type base contactregions 18 are alternately arranged along the gate trenches 9. The widthW₄ of the p⁺-type base contact region 18 is wider than the width W₃, andis, for example, 3 μm to 9 μm. In the active region 10 described above,the area ratio (the arrangement rate of the n⁺-type emitter regions 17)of the n⁺-type emitter regions 17 to the p-type base regions 8 is, forexample, 20% or less, and is preferably 10 to 15%. In this way, it ispossible to achieve a satisfactory short circuit resistance amount.

The p⁺-type base contact region 18 is formed shallower than the bottomportion of the n⁺-type emitter region 17 and the embedding insulatingfilm 14. The depth of the p⁺-type base contact region 18 from the frontsurface 7 is, for example, 0.2 μm to 0.8 μm. The dopant concentration ofthe p⁺-type base contact region 18 is, for example, 5×10¹⁸ cm⁻³ to1×10²⁰ cm⁻³. On the semiconductor substrate 2, an emitter electrode 19is formed. The emitter electrode 19 is formed of, for example, anAl—Si—Cu alloy. The emitter electrode 19 covers the active region 10 andthe embedding insulating film 14 such that its one surface and the othersurface are along the semiconductor (Si) surface and the insulator(SiO₂) surface in the front surface 7. Since as described above, thefront surface 7 is a (substantially) flat surface, the emitter electrode19 is a flat electrode following this flatness. Hence, it is possible toenhance the joint strength when a wiring member such as a bonding wireis joined to the emitter electrode 19.

Specifically, as shown in FIGS. 2 and 3, in the emitter electrode 19, acontact part that is in contact with the active region 10 and that isconnected to the n⁺-type emitter region 17 and the p⁺-type base contactregion 18 and a non-contact part that is in contact with the embeddinginsulating film 14 and that is opposite to the gate electrode 12 arecontinuous without any step. The non-contact part and the gate electrode12 are insulated with the embedding insulating film 14.

Between the semiconductor substrate 2 and the emitter electrode 19, asshown in FIGS. 2 and 3, a barrier film 20 having a Ti/TiN/Ti multilayerstructure may intervene.

A collector electrode 21 is formed in the back surface 3 of thesemiconductor substrate 2. The collector electrode 21 has anAlSi/Ti/Ni/Au multilayer structure in which the layers are depositedsequentially from the back surface 3.

The semiconductor device 1 can be used by being incorporated into, forexample, an inverter circuit 22 as shown in FIG. 4. FIG. 4 is a circuitdiagram of the inverter incorporating the semiconductor device 1.

The inverter circuit 22 is a three-phase inverter circuit that isconnected to a three-phase motor 23 serving as an example of a load. Theinverter circuit 22 includes a direct-current power supply 24 and aswitch portion 25.

In this preferred embodiment, the direct-current power supply 24 is of,for example, 700V. In the direct-current power supply 24, a high-voltageside wiring 26 is connected to its high-voltage side, and a low-voltagewiring 27 is connected to its low-voltage side.

The switch portion 25 includes three arms 28 to 30 that respectivelycorrespond to the U phase 23U, the V phase 23V and the W phase 23W ofthe three-phase motor 23.

The arms 28 to 30 are connected in parallel between the high-voltageside wiring 26 and the low-voltage wiring 27. The arms 28 to 30respectively include high-side transistors (semiconductor device 1) 31Hto 33H on the high-voltage side and low-side transistors (semiconductordevice 1) 31L to 33L on the low-voltage side. Regenerative diodes 34H to36H and 34L to 36L are connected in parallel to the transistors 31H to33H and 31L to 33L in such a direction that a forward current flows fromthe low-voltage side to the high-voltage side.

In the inverter circuit 22, on/off control on the high-side transistors31H to 33H and the low-side transistors 31L to 33L of the arms 28 to 30is alternately switched, that is, a state where one transistor isswitched on and the other transistor is switched off is alternatelyswitched, and thus it is possible to pass an alternating-current to thethree-phase motor 23. On the other hand, a state where both thetransistors are switched off is produced, and thus it is possible tostop the passing of the current to the three-phase motor 23. In thisway, a switching operation on the three-phase motor 23 is performed.

FIGS. 5A to 5L are diagrams showing part of the manufacturing process ofthe semiconductor device 1 in order of steps. In FIGS. 5A to 5L, thediagram on the left side of the plane of the sheet corresponds to thecross-sectional view of FIG. 2, and the diagram on the right side of theplane of the sheet corresponds to the cross-sectional view of FIG. 3.

In the manufacturing of the semiconductor device 1, as shown in FIG. 5A,ap-type dopant is ion-implanted (implantation) in the front surface 7 ofthe n-type semiconductor substrate 2 (the n -type drift region 6), andthereafter anneal processing is performed on the semiconductor substrate2. In this way, the p-type dopant is subjected to drive-in diffusion,and thus the p-type base region 8 is formed.

Next, as shown in FIG. 5B, the semiconductor substrate 2 is selectivelyetched, and thus the gate trenches 9 are formed.

The active region 10 is formed in a part sandwiched between adjacentgate trenches 9.

Next, as shown in FIG. 5C, the semiconductor substrate 2 is thermallyoxidized, and thus the gate insulating film 11 is formed in the entiresurface including the inner surface of the gate trench 9.

Next, as shown in FIG. 5D, for example, by a LPCVD (Low PressureChemical Vapor Deposition) method, an electrode material 37 such aspolysilicon is deposited on the semiconductor substrate 2. Thedeposition of the electrode material 37 is continued until the gatetrenches 9 are completely embedded and the semiconductor substrate 2 iscovered by the electrode material 37.

Next, as shown in FIG. 5E, the electrode material 37 is etched back, andthus an unnecessary part of the electrode material 37 is removed. Inthis way, the gate electrode 12 that is embedded halfway along thedirection of the depth of the gate trench 9 is formed, and the space 13is formed above the gate electrode 12.

Next, as shown in FIG. 5F, the semiconductor substrate 2 is thermallyoxidized, and thus the insulting thin film 16 (thermally oxidized film)is formed on the upper surface of the gate electrode 12 that is notcovered by the gate insulating film 11.

Next, as shown in FIG. 5G, by a CVD method using a TEOS raw material,the insulating material 38 formed of SiO₂ is deposited on thesemiconductor substrate 2. Thereafter, in order to flatten the surfaceof the insulating material 38, anneal processing may be performed on thesemiconductor substrate 2. This anneal processing may be utilized sothat the final depth is adjusted by checking the depth of the p-typebase region 8 at this time which becomes gradually deeper through theheating step of FIGS. 5A (the drive-in diffusion), 5C (the gate thermaloxidation), 5D (the deposition of the polysilicon) and the like.

Next, as shown in FIG. 5H, the insulating material 38 is etched back,and thus an unnecessary part of the insulating material 38 is removed.In this way, the embedding insulating film 14 embedded in the space 13is formed.

Next, as shown in FIG. 5I, an n-type dopant is ion-implanted(implantation) in the front surface 7 of the semiconductor substrate 2,and thereafter anneal processing is performed on the semiconductorsubstrate 2. In this way, the n-type dopant is subjected to drive-indiffusion, and thus the n⁺-type emitter region 17 is formed.

Next, as shown in FIG. 5J, a p-type dopant is ion-implanted(implantation) in the front surface 7 of the semiconductor substrate 2,and thereafter anneal processing is performed on the semiconductorsubstrate 2. In this way, the p-type dopant is subjected to drive-indiffusion, and thus the p⁺-type base contact region 18 is formed.

Next, on the semiconductor substrate 2, for example, by a sputteringmethod, a Ti film is deposited, and is subjected to anneal processing,and thereafter in the same method, a TiN film, a Ti film and an Al—Si—Cualloy film are sequentially deposited. Then, the Ti/TiN/Ti/Al—Si—Cualloy is patterned, and thus as shown in FIG. 5K, the emitter electrode19 and the barrier film 20 are formed simultaneously.

Next, as necessary, the thickness of the semiconductor substrate 2 isreduced by grinding from the back surface 3, then as shown in FIG. 5L,n-type and p-type dopants are selectively ion-planted (implantation) inthe back surface 3 of the semiconductor substrate 2 and thereafteranneal processing (in this preferred embodiment, laser anneal) isperformed on the semiconductor substrate 2. In this way, the n-type andp-type dopants are subjected to drive-in diffusion to form the n-typebuffer region 5 and the p⁺-type collector region 4. Thereafter, forexample, by a sputtering method, an AlSi film, a Ti film, a Ni film andan Au film are deposited sequentially. In this way, the collectorelectrode 21 is formed.

The steps described above are performed, and thus it is possible toobtain the semiconductor device 1 shown in FIGS. 1 to 3. FIGS. 5A to 5Lshow only part of the manufacturing process of the semiconductor device1, and the manufacturing process may include steps that are not shown inFIGS. 5A to 5L.

Since with this semiconductor device 1, as shown in FIGS. 2 and 3, it ispossible to insulate the gate electrode 12 and the emitter electrode 19with the embedding insulating film 14, the entire semiconductor (Si)surface of the active region 10 between adjacent gate trenches 9 can beused as an emitter contact region. Hence, preferably, after theformation of the n⁺-type emitter region 17 and the p⁺-type base contactregion 18 (FIGS. 5I and 5J), without a step of forming an insulatingfilm such as an interlayer insulating film on the semiconductorsubstrate 2, as shown in FIG. 5K, the material of the emitter electrode19 is directly deposited.

Hence, when the contact is formed in the n⁺-type emitter region 17 andthe p⁺-type base contact region 18, it is not necessary to provide adesign margin with consideration given to the displacement of a mask,variations in dimension and the like in a direction perpendicularlyintersecting the gate trench 9. Furthermore, since as shown in FIG. 1,the structure of the n⁺-type emitter region 17 is a bridged structurethat connects adjacent gate trenches 9, in its formation, it is notnecessary to provide the same design margin. Consequently, it ispossible to achieve a reduction in the size of the device without anydesign margin.

Then, the width W₂ of the active region 10 is decreased by the reductionin the size, and thus a hole density in the vicinity of the interfacebetween the p-type base region 8 and the n -type drift region 6 isincreased, with the result that it is possible to reduce an on-voltage.It is possible to prove the effect of increasing the hole density andthe effect of reducing the on-voltage with FIGS. 6 and 7, respectively.

FIG. 6 is simulation data indicating a relationship between the depthfrom the Si surface and the hole density. FIG. 7 is simulation dataindicating a relationship between a collector-emitter voltage (VCE) anda collector current (IC).

In FIGS. 6 and 7, a solid line in an example indicates the result of thesemiconductor device 1 according to this preferred embodiment. On theother hand, a reference example indicates the result of a semiconductordevice in which as an insulating film for insulating the gate electrode12 and the emitter electrode 19, instead of the embedding insulatingfilm 14, the interlayer insulating film on the front surface 7 isadopted, and in which the spacing P₁ between the gate trenches 9 iswidened as compared with the semiconductor device 1 with considerationgiven to the design margin for formation of the contact hole.

It is found from FIG. 6 that the hole density in the example is higherthan that in the reference example regardless of the depth from the Sisurface. It is clear from FIG. 7 that the on-voltage in the example islower than that in the reference example.

Hence, it is found that as in the semiconductor device 1, the spacing P₁between the gate trenches 9 is reduced, and thus it is possible toincrease the hole density and reduce the on-voltage. Consequently, whilethe spacing P₁ is maintained to acquire a relatively low on-voltage, thearea ratio (the arrangement rate of the n⁺-type emitter regions 17) ofthe n⁺-type emitter regions 17 to the p-type base regions 8 is adjusted,and thus it is possible to easily control the short circuit resistancevalue. In other words, with the semiconductor device 1, it is possibleto improve the trade-off relationship between the on-voltage and theshort circuit resistance amount.

FIG. 8 is a schematic cross-sectional view of a semiconductor device 50according to a preferred embodiment of the present invention. In FIG. 8,constituent elements different from those of the semiconductor device 1described above are mainly described, the common constituent elementsare identified with the same symbols and their description is omitted.

In the semiconductor device 51, an emitter trench 44 is formed so as tobe opposite to the gate trench 9 via the n⁻-type drift region 6. Asshown in FIG. 8, the emitter trenches 44 may be provided in pairs so asto sandwich each of the gate trenches 9. In FIG. 8, a plurality oftrench units each of which includes the gate trench 9 and a pair ofemitter trenches 44 are formed in a stripe shape.

In the emitter trench 44, as in the gate trench 9, an embeddingelectrode 46 may be arranged via an insulating film 45. The embeddingelectrode 46 may be electrically connected to the emitter electrode 19.The insulating film 45 and the embedding electrode 46 can berespectively formed in the same steps as the gate insulating film 11 andthe gate electrode 12. Hence, in the emitter trench 44, above theembedding electrode 46, a space 47 defined by the upper surface of theembedding electrode 46 and both side surfaces of the emitter trench 44may be formed.

In the space 47, an embedding insulating film 48 formed of an insulatingmaterial such as SiO₂ may be embedded. The embedding insulating film 48may be formed integrally with a surface insulating film 49 that connectsadjacent emitter trenches 44. The embedding insulating film 48 and thesurface insulating film 49 can be formed in the same step as theembedding insulating film 14. For example, preferably, after thedeposition of the insulating material 38 in FIG. 5G, a part necessaryfor the contact of the emitter electrode 19 is selectively etched toform a contact hole 53, and the parts other than the contact hole 53 areleft as the surface insulating film 49.

In the front surface portion of the p-type base region 8 between thegate trench 9 and one emitter trench 44, the n⁺-type emitter region 17is formed, and in the front surface portion of the p-type base region 8between the gate trench 9 and the other emitter trench 44, the p⁺-typebase contact region 18 is formed.

In the n⁻-type drift region 6 between adjacent emitter trenches 44, ap-type floating region 52 is formed. The p-type floating region 52 isopposite to the surface insulating film 49. The p-type floating region52 is a semiconductor region in which a floating state is electricallymaintained, and is separated from the gate trench 9 by the emittertrench 44 adjacent to the gate trench 9. The p-type floating region 52may extend to a position (for example, a position beyond the bottomportion of the emitter trench 44) deeper than the p-type base region 8.In this way, it is possible to alleviate the collector-emitter voltageapplied to the emitter trench 44 when a switching-off operation isperformed. Hence, it is possible to prevent the device from beingdestroyed by rapid variations in voltage (dv/dt). The dopantconcentration of the p-type floating region 52 is, for example, 5×10¹⁵cm⁻³ to 1×10¹⁸ cm⁻³.

The spacing P₃ between adjacent emitter trenches 44 is, for example, 1.5μm or more, and is preferably 3 μm or less. The spacing P₄ between apair of emitter trenches 44 opposite to each other through the gatetrench 9 is, for example, 3 μm or less. The spacing P₄ may be equal tothat of, for example, the contact hole 53.

Since in the semiconductor device 50 described above, the embeddinginsulating films 14 and 48 are formed, as in the semiconductor device 1described above, it is possible to achieve a reduction in the size ofthe device in which a design margin is removed. Furthermore, it ispossible to achieve a high short circuit resistance amount with thep-type floating region 52. In other words, it is possible to achieveboth the reduction in the size and high performance of the device. Forexample, with respect to the reduction in the size, it is possible toreduce the size of the contact hole 53 to about 3 μm.

FIGS. 9 to 11 are schematic cross-sectional views of the semiconductordevice 51 according to the preferred embodiment of the presentinvention, and respectively correspond to cross sections of thesemiconductor device 51 taken along lines A-A, B-B and C-C in FIG. 1. InFIGS. 9 to 11, constituent elements different from those of thesemiconductor device 1 described above are mainly described, the commonconstituent elements are identified with the same symbols and theirdescription is omitted.

In the semiconductor device 51, the embedding insulating film 14 isembedded in the space 13. The embedding insulating film 14 is formed of,for example, SiO₂. The embedding insulating film 14 includes a sidesurface 40 that protrudes beyond the front surface 7 of the activeregion 10 and that is continuous to the side surface 39 of the gatetrench 9. In other words, the side surface 39 of the gate trench 9 andthe side surface 40 of the embedding insulating film 14 are continuousalong the direction of the depth of the gate trench 9 without any step.The expression “continuous without any step” means that a minute stepformed by the thickness of a thin film such as the gate insulating film11 is ignored.

Since the embedding insulating film 14 protrudes beyond the frontsurface 7, on the semiconductor substrate 2, a dug structure 41 which isformed by a step between the front surface 7 of the semiconductorsubstrate 2 and the upper surface 15 of the embedding insulating film 14and in which the active region 10 is exposed to its bottom portion isformed. The dug structures 41 are formed in the entire semiconductorregion in the stripe shape divided by the gate trenches 9.

The dug structure 41 may be formed at such a depth that as shown inFIGS. 9 and 10, the position of the depth of the front surface 7 of theactive region 10 is located halfway along the direction of the thicknessof the embedding insulating film 14. In other words, the embeddinginsulating film 14 may be formed so as to straddle the lower and uppersides of the front surface 7 of the active region 10. The depth of thedug structure 41 is, for example, 0.3 μm to 0.6 μm.

Between the embedding insulating film 14 and the gate electrode 12, theinsulting thin film 16 intervenes. The insulting thin film 16 is formedof, for example, SiO₂. The insulting thin film 16 is thinner than thegate insulating film 11, and has a thickness of, for example, 150 to 250Å (in this preferred embodiment, 200 Å).

In the active region 10, in the front surface portion of the p-type baseregion 8, a plurality of n⁺-type emitter regions 17 are formed. Each ofthe n⁺-type emitter regions 17 is formed so as to connect adjacent gatetrenches 9. That the n⁺-type emitter region 17 connects adjacent gatetrenches 9 means that as shown in FIG. 1, each of the n⁺-type emitterregions 17 is not divided while extending from one gate trench 9 to theother gate trench 9.

The n⁺-type emitter regions 17 are aligned in a stripe shape thatperpendicularly intersects the gate trenches 9 in the stripe shape. Inthis way, the gate trenches 9 and the n⁺-type emitter regions 17 as awhole are formed in a lattice shape in a plan view. As shown in FIG. 1,the spacing P₂ of the adjacent n⁺-type emitter regions 17 (the distancebetween the centers of the n⁺-type emitter regions 17) is, for example,3.5 μm to 10 μm. The width W₃ of the n⁺-type emitter region 17 is, forexample, 0.35 μm to 1.0 μm.

The n⁺-type emitter region 17 is formed deeper than the bottom portionof the embedding insulating film 14, and is opposite to the gateelectrode 12 via the gate insulating film 11. The depth of the n⁺-typeemitter region 17 from the front surface 7 is, for example, 0.2 μm to0.5 μm. The dopant concentration of the n⁺-type emitter region 17 is1×10¹⁹ cm⁻² to 5×10²⁰ cm⁻².

In the active region 10, in the front surface portion of the p-type baseregion 8, a plurality of p⁺-type base contact regions 18 are formed. Thep⁺-type base contact regions 18 are formed in the entire region exceptthe n⁺-type emitter regions 17 in the active region 10. In other words,in the active region 10, in the front surface portion of the p-type baseregion 8, the n⁺-type emitter regions 17 and the p⁺-type base contactregions 18 are alternately arranged along the gate trenches 9. The widthW₄ of the p⁺-type base contact region 18 is wider than the width W₃, andis, for example, 3 μm to 9 μm. In the active region 10 described above,the area ratio (the arrangement rate of the n⁺-type emitter regions 17)of the n⁺-type emitter regions 17 to the p-type base regions 8 is, forexample, 20% or less, and is preferably 10 to 15%. In this way, it ispossible to achieve a satisfactory short circuit resistance amount. Asshown in FIG. 11, the p⁺-type base contact region 18 is formed at thesame depth as the n⁺-type emitter region 17. The depth of the p⁺-typebase contact region 18 from the front surface 7 is, for example, 0.2 μmto 0.8 μm. The dopant concentration of the p⁺-type base contact region18 is, for example, 5×10¹⁸ cm⁻³ to 1×10²⁰ cm⁻³.

On the semiconductor substrate 2, an emitter electrode 19 is formed. Theemitter electrode 19 is formed of, for example, an Al—Si—Cu alloy. Theemitter electrode 19 enters the dug structure 41 and is connected to then⁺-type emitter region 17 and the p⁺-type base contact region 18.

Specifically, as shown in FIGS. 9 and 10, the emitter electrode 19includes a contact part that is in contact with the active region 10 andthat is connected to the n⁺-type emitter region 17 and the p⁺-type basecontact region 18 and a non-contact part that is in contact with theembedding insulating film 14 and that is opposite to the gate electrode12. The non-contact part and the gate electrode 12 are insulated withthe embedding insulating film 14.

Between the semiconductor substrate 2 and the emitter electrode 19, asshown in FIGS. 9 and 10, a barrier film 20 having a Ti/TiN/Ti multilayerstructure may intervene. The barrier film 20 is formed such that its onefront surface and the other front surface are along projections andrecesses on the semiconductor substrate 2 formed by the dug structure41.

A collector electrode 21 is formed in the back surface 3 of thesemiconductor substrate 2. The collector electrode 21 has anAlSi/Ti/Ni/Au multilayer structure in which the layers are depositedsequentially from the back surface 3.

As with the semiconductor device 1 described above, the semiconductordevice 51 can also be used by being incorporated into, for example, aninverter circuit 22 as shown in FIG. 4.

A method of manufacturing the semiconductor device 51 will then bedescribed.

In order to manufacture the semiconductor device 51, the same steps asshown in FIGS. 5A to 5G are first performed.

In FIG. 5G, after the deposition of the insulating material 38 on thesemiconductor substrate 2, as shown in FIG. 12A, the insulating material38 is etched back, and thus an unnecessary part of the insulatingmaterial 38 is removed. In this way, the embedding insulating film 14embedded in the space 13 is formed. Here, the embedding insulating film14 has the upper surface 15 in the same height position as the frontsurface 7 of the active region 10 or in a height position lower than thefront surface 7. When the upper surface 15 is in the height positionlower than the front surface 7 of the active region 10, its differencein height is caused by a recess formed by slightly over-etching theinsulating material 38 when the insulating material 38 is etched back.Hence, the front surface 7 of the semiconductor substrate 2 is a flatsurface in which the semiconductor (Si) surface and the insulator (SiO₂)surface are continuous without any step or is a substantially flatsurface in which the insulation (SiO₂) surface is slightly recessed withrespect to the semiconductor (Si) surface to form an extremely shallowconcave portion. Next, as shown in FIG. 12B, the active region 10sandwiched between the embedding insulating films 14 is selectivelyetched to form the dug structure 41. Here, since the embeddinginsulating film 14 (SiO₂) has an etching selection ratio with respect tothe active region 10 (Si), it can be used as an etching mask. In thisway, the dug structure 41 is formed in a self-aligned manner withrespect to the dug structure 41.

Next, as shown in FIG. 12C, an n-type dopant is ion-implanted(implantation) in the front surface 7 of the semiconductor substrate 2,and thereafter anneal processing is performed on the semiconductorsubstrate 2. In this way, the n-type dopant is subjected to drive-indiffusion, and thus the n⁺-type emitter region 17 is formed.

Next, as shown in FIG. 12D, ap-type dopant is ion-implanted(implantation) in the front surface 7 of the semiconductor substrate 2,and thereafter anneal processing is performed on the semiconductorsubstrate 2. In this way, the p-type dopant is subjected to drive-indiffusion, and thus the p⁺-type base contact region 18 is formed.

Next, on the semiconductor substrate 2, for example, by a sputteringmethod, a Ti film is deposited, and is subjected to anneal processing,and thereafter in the same method, a TiN film, a Ti film and an Al—Si—Cualloy film are sequentially deposited. Then, the Ti/TiN/Ti/Al—Si—Cualloy is patterned, and thus as shown in FIG. 12E, the emitter electrode19 and the barrier film 20 are formed simultaneously.

Next, as necessary, the thickness of the semiconductor substrate 2 isreduced by grinding from the back surface 3, then as shown in FIG. 12F,n-type and p-type dopants are selectively ion-planted (implantation) inthe back surface 3 of the semiconductor substrate 2 and thereafteranneal processing (in this preferred embodiment, laser anneal) isperformed on the semiconductor substrate 2. In this way, the n-type andp-type dopants are subjected to drive-in diffusion to form the n-typebuffer region 5 and the p⁺-type collector region 4. Thereafter, forexample, by a sputtering method, an AlSi film, a Ti film, a Ni film andan Au film are deposited sequentially. In this way, the collectorelectrode 21 is formed.

The steps described above are performed, and thus it is possible toobtain the semiconductor device 51 shown in FIGS. 9 to 11. FIGS. 12A to12F show only part of the manufacturing process of the semiconductordevice 51, and the manufacturing process may include steps that are notshown in FIGS. 12A to 12F.

Since with this semiconductor device 51, as shown in FIGS. 9 and 10, itis possible to insulate the gate electrode 12 and the emitter electrode19 with the embedding insulating film 14, the entire semiconductor (Si)surface of the active region 10 between adjacent gate trenches 9 can beused as an emitter contact region. Hence, preferably, after theformation of the n⁺-type emitter region 17 and the p⁺-type base contactregion 18 (FIGS. 12C and 12D), without a step of forming an insulatingfilm such as an interlayer insulating film on the semiconductorsubstrate 2, as shown in FIG. 12E, the material of the emitter electrode19 is directly deposited.

Hence, when the contact is formed in the n⁺-type emitter region 17 andthe p⁺-type base contact region 18, it is not necessary to provide adesign margin with consideration given to the displacement of a mask,variations in dimension and the like in a direction perpendicularlyintersecting the gate trench 9. Furthermore, since as shown in FIG. 1,the structure of the n⁺-type emitter region 17 is a bridged structurethat connects adjacent gate trenches 9, in its formation, it is notnecessary to provide the same design margin. Consequently, it ispossible to achieve a reduction in the size of the device without anydesign margin.

Then, the width W₂ of the active region 10 is decreased by the reductionin the size, and thus a hole density in the vicinity of the interfacebetween the p-type base region 8 and the n -type drift region 6 isincreased, with the result that it is possible to reduce an on-voltage.As in the semiconductor device 1, it is possible to prove the effect ofincreasing the hole density and the effect of reducing the on-voltagewith FIGS. 6 and 7, respectively.

Hence, it is found that as in the semiconductor device 51, the spacingP₁ between the gate trenches 9 is reduced, and thus it is possible toincrease the hole density and reduce the on-voltage. Consequently, whilethe spacing P₁ is maintained to acquire a relatively low on-voltage, thearea ratio (the arrangement rate of the n⁺-type emitter regions 17) ofthe n⁺-type emitter regions 17 to the p-type base regions 8 is adjusted,and thus it is possible to easily control the short circuit resistancevalue. In other words, with the semiconductor device 51, it is possibleto improve the trade-off relationship between the on-voltage and theshort circuit resistance amount.

Furthermore, since in the semiconductor device 51, the dug structure 41is formed, it is possible to reduce the distance from the semiconductor(Si) surface in the active region 10 to the apex portion of the gateelectrode 12. Specifically, as shown in FIG. 11, as compared with aheight position 42 of the front surface 7 when the dug structure 41 isnot formed, it is possible to lower the front surface 7. Hence, even ifthe n⁺-type emitter region 17 is formed more shallow, it is possible toreliably make the n⁺-type emitter region 17 face the gate electrode 12.Since the n⁺-type emitter region 17 is allowed to be shallow, it ispossible to reduce the time in which the impurity is diffused when then⁺-type emitter region 17 is formed. In this way, as shown in FIG. 11,it is possible to reduce the spreading 43 of the impurity laterally in adirection within a plane along the front surface 7 of the semiconductorsubstrate 2. Consequently, it is possible to achieve the reduction inthe size by reducing the loss of the pattern of the n⁺-type emitterregion 17 and to realize high performance (the reduction of the seriesresistance of the emitter electrode 19) by decreasing the depth (p-typebase length) of the p-type base region 8 from the front surface 7.

Although the preferred embodiments of the present invention have beendescribed above, the present invention can be implemented with anotherpreferred embodiment.

For example, a configuration in which the conductive-type of thesemiconductor parts of the semiconductor devices 1, 50 and 51 isinverted may be adopted. In other words, in the semiconductor devices 1,50 and 51, the p-type part may be of n-type, and the n-type part may beof p-type.

Although in the preferred embodiments described above, only theconfiguration of the IGBT included in the semiconductor devices 1, 50and 51 has been illustrated, the semiconductor device of the presentinvention may include, in a region different from the region where theIGBT is formed, elements (for example, a MOSFET and a diode) other thanthe IGBT.

In the semiconductor device 51, the bottom portion of the embeddinginsulating film 14 may be located in the same height position as thefront surface 7 of the semiconductor substrate 2.

In the semiconductor device 51, the n⁺-type emitter region 17 may bedivided in the process of extending from one gate trench 9 to the othergate trench 9.

Various types of design changes are possible within the scope of claims.

What is claimed is:
 1. A semiconductor device comprising: a firstconductive-type semiconductor layer; a second conductive-type baseregion that is arranged in a front surface portion of the semiconductorlayer; a plurality of trenches that extend from a front surface of thesemiconductor layer beyond a bottom portion of the base region, anactive region being defined therebetween; a plurality of firstconductive-type emitter regions that are arranged in the active region,each connecting the trenches adjacent to each other; a gate electrodethat is embedded in the trench; an embedding insulating film that isembedded in the trench on the gate electrode and that has an uppersurface in the same height position as the front surface of thesemiconductor layer or in a height position lower than the frontsurface; and an emitter electrode that covers the active region and theembedding insulating film and that is electrically connected to the baseregion and the emitter region.
 2. The semiconductor device according toclaim 1, wherein the emitter electrode is a flat electrode.
 3. Thesemiconductor device according to claim 1, further comprising: a secondconductive-type base contact region that is selectively arranged in theactive region and that is connected to the base region at a bottomportion.
 4. The semiconductor device according to claim 3, wherein thebase contact region is formed shallower than the emitter region.
 5. Thesemiconductor device according to claim 3, wherein the base contactregion is formed shallower than the embedding insulating film, and theemitter region is formed deeper than the embedding insulating film. 6.The semiconductor device according to claim 3, wherein the base contactregion is formed in an entire region of the active region other than theemitter region.
 7. The semiconductor device according to claim 1,wherein the trenches are formed in a stripe shape, and the emitterregions are formed in a stripe shape perpendicularly intersecting thetrenches in the stripe shape.
 8. The semiconductor device according toclaim 1, wherein a spacing between the trenches adjacent to each otheris 1 μm or less.
 9. The semiconductor device according to claim 8,wherein a spacing between the emitter regions adjacent to each other is3.5 μm to 10 μm.
 10. The semiconductor device according to claim 1,wherein the embedding insulating film is formed of SiO₂.
 11. Thesemiconductor device according to claim 1, wherein the gate electrode isformed of polysilicon.
 12. The semiconductor device according to claim1, wherein the semiconductor layer is formed of Si.
 13. Thesemiconductor device according to claim 1, wherein the emitter electrodeis formed of an Al—Si—Cu alloy.
 14. The semiconductor device accordingto claim 13, further comprising: a barrier layer that has a Ti/TiN/Timultilayer structure arranged between the emitter electrode and thesemiconductor layer.
 15. A method of manufacturing a semiconductordevice, the method comprising: a step of forming a secondconductive-type base region in a front surface portion of a firstconductive-type semiconductor layer; a step of forming a plurality oftrenches that extend from a front surface of the semiconductor layerbeyond a bottom portion of the base region so as to define an activeregion therebetween; a step of embedding the trench with a gateelectrode; a step of forming, by selectively removing the gate electrodefrom an upper portion, a space defined by a side surface of the trenchon the gate electrode; a step of embedding, in the space, an embeddinginsulating film that has an upper surface in the same height position asthe front surface of the semiconductor layer or in a height positionlower than the front surface; a step of forming, in the active region, aplurality of first conductive-type emitter regions such that each of theemitter regions connects the trenches adjacent to each other; and a stepof forming an emitter electrode so as to cover the active region and theembedding insulating film.
 16. The method of manufacturing asemiconductor device according to claim 15, wherein the step ofembedding the embedding insulating film includes: a step of depositingan insulating material so as to cover the front surface of thesemiconductor layer; and a step of forming the embedding insulating filmby etching back the insulating material until the front surface of thesemiconductor layer is exposed.
 17. The method of manufacturing asemiconductor device according to claim 16, wherein the step ofdepositing the insulating material includes a step of depositing SiO₂with a CVD method using a TEOS raw material.
 18. A semiconductor devicecomprising: a first conductive-type semiconductor layer; a secondconductive-type base region that is arranged in a front surface portionof the semiconductor layer; a plurality of trenches that extend from afront surface of the semiconductor layer beyond a bottom portion of thebase region; a gate electrode that is embedded in the trench; aninsulating film that protrudes beyond the front surface of thesemiconductor layer on the gate electrode and that has a side surfacecontinuous to a side surface of the trench; a dug structure which isformed by a step between the semiconductor layer and the insulating filmand in which an active region formed with the semiconductor layer isdefined in a bottom portion; a first conductive-type emitter region thatis selectively arranged in the active region; and an emitter electrodethat covers the active region and the insulating film and that iselectrically connected to the base region and the emitter region. 19.The semiconductor device according to claim 18, wherein the dugstructure is spread over an entire semiconductor region between thetrenches adjacent to each other.
 20. The semiconductor device accordingto claim 18, wherein the emitter region is formed so as to connect thetrenches adjacent to each other.
 21. The semiconductor device accordingto claim 18, further comprising: a second conductive-type base contactregion that is selectively arranged in the active region and that isconnected to the base region at a bottom portion.
 22. The semiconductordevice according to claim 21, wherein the base contact region is formedat the same depth as the emitter region.
 23. The semiconductor deviceaccording to claim 21, wherein the base contact region is formed in anentire region of the active region other than the emitter region. 24.The semiconductor device according to claim 18, wherein the trenches areformed in a stripe shape, and the emitter regions are formed in a stripeshape perpendicularly intersecting the trenches in the stripe shape. 25.The semiconductor device according to claim 18, wherein a spacingbetween the trenches adjacent to each other is 1 μm or less.
 26. Thesemiconductor device according to claim 25, wherein a plurality of theemitter regions are formed along the trenches, and a spacing between theemitter regions adjacent to each other is 3.5 μm to 10 μm.
 27. Thesemiconductor device according to claim 18, wherein the insulating filmis formed of SiO₂.
 28. The semiconductor device according to claim 18,wherein the gate electrode is formed of polysilicon.
 29. Thesemiconductor device according to claim 18, wherein the semiconductorlayer is formed of Si.
 30. The semiconductor device according to claim18, wherein the emitter electrode is formed of an Al—Si—Cu alloy. 31.The semiconductor device according to claim 30, further comprising: abarrier layer that has a Ti/TiN/Ti multilayer structure arranged betweenthe emitter electrode and the semiconductor layer.
 32. A method ofmanufacturing a semiconductor device, the method comprising: a step offorming a second conductive-type base region in a front surface portionof a first conductive-type semiconductor layer; a step of forming aplurality of trenches that extend from a front surface of thesemiconductor layer beyond a bottom portion of the base region; a stepof embedding the trench with a gate electrode; a step of forming, byselectively removing the gate electrode from an upper portion, a spacedefined by a side surface of the trench on the gate electrode; a step ofembedding, in the space, an insulating film that has an upper surface inthe same height position as the front surface of the semiconductor layeror in a height position lower than the front surface; a step of removingthe semiconductor layer from the front surface in a self-aligned mannerfor the insulating film so as to form a dug structure in which an activeregion formed with the semiconductor layer is defined at a bottomportion; a step of selectively implanting a first conductive-typeimpurity in the dug structure and diffusing the first conductive-typeimpurity so as to form an emitter region in the active region; and astep of forming an emitter electrode so as to cover the active regionand the insulating film.
 33. The method of manufacturing a semiconductordevice according to claim 32, wherein the step of embedding theinsulating film includes: a step of depositing an insulating material soas to cover the front surface of the semiconductor layer; and a step offorming the insulating film by etching back the insulating materialuntil the front surface of the semiconductor layer is exposed.
 34. Themethod of manufacturing a semiconductor device according to claim 33,wherein the step of depositing the insulating material includes a stepof depositing SiO₂ with a CVD method using a TEOS raw material.
 35. Asemiconductor device comprising: a first conductive-type semiconductorlayer; a gate trench and an emitter trench that are formed in thesemiconductor layer; a gate electrode that is embedded in the gatetrench; an embedding electrode that is embedded in the emitter trench; asecond conductive-type base region that is formed in a front surfaceportion of the semiconductor layer between the gate trench and theemitter trench; a first conductive-type emitter region that is formed ina front surface portion of the base region; a first embedding insulatingfilm that is embedded in the gate trench on the gate electrode and thathas an upper surface in the same height position as a front surface ofthe semiconductor layer or in a height position lower than the frontsurface; a second embedding insulating film that is embedded in theemitter trench on the embedded electrode and that has an upper surfacein the same height position as the front surface of the semiconductorlayer or in a height position lower than the front surface; and anemitter electrode that covers the first and second embedding insulatingfilms and that are electrically connected to the base region and theemitter region.
 36. The semiconductor device according to claim 35,wherein a plurality of the emitter trenches are formed, and thesemiconductor device includes a second conductive-type floating regionformed between the emitter trenches.